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Dust Hour Glass in a Capacitive RF Discharge

  • Metaadatok
Tartalom: http://real.mtak.hu/51459/
Archívum: MTA Könyvtár
Gyűjtemény: Status = Published


Type = Article
Cím:
Dust Hour Glass in a Capacitive RF Discharge
Létrehozó:
Iwashita, S.
SchĂĽngel, Edmund
Schulze, Julian
Hartmann, Peter
Donkó, Zoltán
Uchida, G.
Koga, K.
Shiratani, M.
Czarnetzki, U.
Kiadó:
Institute of Electrical and Electronics Engineers
Dátum:
2014-10
Téma:
QC Physics / fizika
QC04 Electricity. Magnetism. Electromagnetism / villamosság, mágnesesség, elektromágnessesség
Tartalmi leírás:
Cyclic transport of dust particles (dust hour glass) in a capacitively coupled radio frequency discharge with horizon- tal electrodes is demonstrated. Dust transport toward the upper electrode is initiated by varying the electrical asymmetry of the discharge. A shaped upper electrode guides dust particles to move toward the center of the discharge. Subsequently, the dust drops through the plasma bulk spontaneously, this way returning to the starting location.
Nyelv:
angol
Típus:
Article
PeerReviewed
info:eu-repo/semantics/article
Formátum:
text
Azonosító:
Iwashita, S. and Schüngel, Edmund and Schulze, Julian and Hartmann, Peter and Donkó, Zoltán and Uchida, G. and Koga, K. and Shiratani, M. and Czarnetzki, U. (2014) Dust Hour Glass in a Capacitive RF Discharge. IEEE Transactions on Plasma Science, 42. pp. 2672-2673. ISSN 0093-3813
Kapcsolat:
https://doi.org/10.1109/TPS.2014.2343975
10.1109/TPS.2014.2343975