Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
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Tartalom: http://real.mtak.hu/29896/
Archívum: MTA Könyvtár
Gyűjtemény: Status = Published

Type = Article
Cím:
Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
Létrehozó:
Agócs, Emil
Bodermann, Brend
Burger, Sven
Dai, Gaoliang
Endres, Johannes
Dátum:
2015
Téma:
QC02 Optics / fénytan
Típus:
Article
PeerReviewed
Formátum:
text
Azonosító:
Agócs, Emil and Bodermann, Brend and Burger, Sven and Dai, Gaoliang and Endres, Johannes (2015) Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 9556. p. 955610. ISSN 0277-786X
Kapcsolat:
https://dx.doi.org/10.1117/12.2190409