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The Si p partial density of states in SiNx (0<x<2,0) |
Tartalom: | http://real.mtak.hu/6535/ |
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Archívum: | MTA Könyvtár |
Gyűjtemény: |
Status = Published
Type = Article |
Cím: |
The Si p partial density of states in SiNx (0<x<2,0)
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Létrehozó: |
Kojnok, J.
Gyarmati, E.
Nickel, H.
Szász, András
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Dátum: |
1993
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Téma: |
QC Physics / fizika
QC06 Physics of condensed matter / szilárdtestfizika
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Tartalmi leírás: |
Some properties of non-stoichiometric amorphous silicon nitride, SiNx (0 < x < 2.0), prepared by physical vapour deposition in which hydrogen was excluded from the process, were investigated by X-ray fluorescence spectroscopy. The SiK? and SiK? emission lines were measured. A non-bonding p-type vacancy state on the top upper Si valence band is identified up to the composition x = 1.2. This state was not observed in other studies of hydrogenated SiNx: H systems. The N 2s state derived lower valence band was split from the upper valence band with 2 eV valence band gap. The observed non-linear dependence of the Si p-band on x is inconsistent with a two-phase (Si and Si3N4) linear superposition model of this semiconducting amorphous alloy. The random bonding model is consistent with this dependence.
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Típus: |
Article
PeerReviewed
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Formátum: |
text
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Azonosító: |
Kojnok, J. and Gyarmati, E. and Nickel, H. and Szász, András (1993) The Si p partial density of states in SiNx (0<x<2,0). JOURNAL OF NON-CRYSTALLINE SOLIDS, 155. pp. 155-164. ISSN 0022-3093
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Kapcsolat: |