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Channeling-like effects due to the macroscopic structure of porous silicon

  • Metaadatok
Tartalom: http://dx.doi.org/10.1016/0168-583X(96)00245-5
Archívum: MTA Könyvtár
Gyűjtemény: Status = Published


Type = Article
Cím:
Channeling-like effects due to the macroscopic structure of porous silicon
Létrehozó:
Hajnal, Zoltán
Szilágyi, Edit
Pászti, Ferenc
Battistig, Gábor
Kiadó:
Elsevier
Dátum:
1996
Téma:
QC Physics / fizika
TK Electrical engineering. Electronics Nuclear engineering / elektrotechnika, elektronika, atomtechnika
Tartalmi leírás:
When performing Rutherford Backscattering Spectrometry (RBS) measurements combined with channeling on ''columnar'' porous Si samples with the beam aligned to the direction of the pores, an additional yield decrease appears due to the macroscopic structure. Changes in the stopping power as the ions cross holes and material walls will also result in an additional spread in the ion energy. This work presents both experimental results and Monte Carlo type simulations showing the above structural effects. The simulations were done by a currently developed code, RBS-MAST, which is able to treat arbitrary structures on a nm-mu m scale.
Típus:
Article
PeerReviewed
Formátum:
text
Azonosító:
Hajnal, Zoltán and Szilágyi, Edit and Pászti, Ferenc and Battistig, Gábor (1996) Channeling-like effects due to the macroscopic structure of porous silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 118 (1-4). pp. 617-621. ISSN 0168-583X
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